Microelectromechanical Systems Materials Devices (51 results)

- Hardcover
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Language: English
Published by Warrendale, Pa., Materials Research Society 1999
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Hardcover. 246 S. Ehem. Bibliotheksexemplar mit Bib.-Signatur und Stempel in GUTEM Zustand. Kaum Gebrauchsspuren. 1558994521 Sprache: Englisch Gewicht in Gramm: 550.

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- Softcover
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- Softcover
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- Softcover
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- Softcover
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- Softcover
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- Softcover
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Taschenbuch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', held November 29-December 3 at the 2010 MRS Fall Meeting in Boston, Massachusetts, focused on micro- and nanoelectromechanical systems (MEMS/NEMS), technologies which were sp…awned from the fabrication and integration of small-scale mechanical, electrical, thermal, magnetic, fluidic and optical sensors and actuators with micro-electronic components. MEMS and NEMS have enabled performance enhancements and manufacturing cost reductions in a number of applications, including optical displays, acceleration sensing, radio-frequency switching, drug delivery, chemical detection and power generation and storage. Although originally based on silicon microelectronics, the reach of MEMS and NEMS has extended well beyond traditional engineering materials and now includes nanomaterials (nanotubes, nanowires, nanoparticles), smart materials (piezoelectric and ferroelectric materials, shape memory alloys, pH-sensitive polymers), metamaterials and biomaterials (ceramic, metallic, polymeric, composite-based implant materials). While these new materials provide more freedom with regards to the design space of MEMS and NEMS, they also introduce a number of new fabrication and characterization challenges not previously encountered with silicon-based technology.

- Softcover
Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH
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Taschenbuch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural member…s rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing.

- Hardcover
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- Hardcover
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- Hardcover
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- Hardcover
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Microelectromechanical Systems - Materials and Devices: Volume 1052
. Ed(s): LaVan, David A.; Da Silva, Mark G.; Spearing, S. Mark; Vengallatore, Srikar
- Hardcover
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Condition: New. The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. Editor(s): LaVan, David A.; Da Silva, Mark G.; Spearing, S. Mark; Vengallatore, Srikar. Series: MRS Proceedings. Num Pages: 325 pages, Illustrations. BIC Classification: TGM; TJF. Category: (…U) Tertiary Education (US: College). Dimension: 228 x 152 x 23. Weight in Grams: 577. . 2008. Hardback. . . . .

- Hardcover
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Condition: New. pp. xi + 247.

- Hardcover
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Condition: New. pp. xiv + 325.

Microelectromechanical Systems - Materials and Devices: Volume 1052
. Ed(s): LaVan, David A.; Da Silva, Mark G.; Spearing, S. Mark; Vengallatore, Srikar
- Hardcover
Seller: Kennys Bookstore, Olney, U.S.A.Kennys Bookstore
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Condition: New. The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. Editor(s): LaVan, David A.; Da Silva, Mark G.; Spearing, S. Mark; Vengallatore, Srikar. Series: MRS Proceedings. Num Pages: 325 pages, Illustrations. BIC Classification: TGM; TJF. Category: (…U) Tertiary Education (US: College). Dimension: 228 x 152 x 23. Weight in Grams: 577. . 2008. Hardback. . . . . Books ship from the US and Ireland.

Microelectromechanical Systems: Materials and Devices II
Spearing, S. M. (Editor)/ Vengallatore, S. (Editor)/ Sheppard, N. (Editor)/ Bagdahn, J. (Editor)
- Hardcover
Seller: Revaluation Books, Exeter, United KingdomRevaluation Books
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Hardcover. Condition: Brand New. 247 pages. 9.30x6.20x0.70 inches. In Stock.

Microelectromechanical Systems: Materials and Devices
Lavan, D. (Editor)/ Spearing, M. (Editor)/ Venallatore, S. (Editor)/ Da Silva, M. (Editor)
- Hardcover
Seller: Revaluation Books, Exeter, United KingdomRevaluation Books
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Hardcover. Condition: Brand New. 325 pages. 9.13x6.57x1.11 inches. In Stock.

- Hardcover
Seller: Mispah books, Redhill, United KingdomMispah books
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- Hardcover
Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH
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Buch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - This book is part of a popular series on the materials science of MEMS devices. In the years since, many sophisticated devices have emerged and many aspects of MEMS materials behaviors have been characterized. However, there remain many basic questions ab…out the relationship between process, properties and function for MEMS materials. Experimental methods have been developed, but there remains a lack of standardization that would allow comparison between laboratories and commercial vendors or the creation of materials specifications that would enable greater commercialization of MEMS. The book addresses many of these issues including: RF-MEMS; optical MEMS; MEMS metrology, tribology, materials characterization and mechanical behavior; MEMS surfaces, MEMS reliability, packaging and life assessment; MEMS modeling and software tools for materials integration; biocompatibility of MEMS materials and devices; new materials and fabrication methodologies for MEMS; microfluidics and nanofluidics; in vivo drug/gene/protein delivery; novel actuators; MEMS cell-based systems; MEMS neural interfaces; MEMS sensors; and MEMS microengines and microfuel cells.

- Softcover
- Print on Demand
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Paperback. Condition: new. Paperback. Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', held November 29December 3 at the 2010 MRS Fall Meeting in Boston, Massachusetts, focused on micro- and nanoelectromechanical systems (MEMS/NEMS), technologies which were spawned from the fabrication and integration of… small-scale mechanical, electrical, thermal, magnetic, fluidic and optical sensors and actuators with micro-electronic components. MEMS and NEMS have enabled performance enhancements and manufacturing cost reductions in a number of applications, including optical displays, acceleration sensing, radio-frequency switching, drug delivery, chemical detection and power generation and storage. Although originally based on silicon microelectronics, the reach of MEMS and NEMS has extended well beyond traditional engineering materials and now includes nanomaterials (nanotubes, nanowires, nanoparticles), smart materials (piezoelectric and ferroelectric materials, shape memory alloys, pH-sensitive polymers), metamaterials and biomaterials (ceramic, metallic, polymeric, composite-based implant materials). While these new materials provide more freedom with regards to the design space of MEMS and NEMS, they also introduce a number of new fabrication and characterization challenges not previously encountered with silicon-based technology. Symposium S, 'Microelectromechanical Systems - Materials and Devices IV', focused on micro- and nanoelectromechanical systems (MEMS/NEMS). This item is printed on demand. Shipping may be from multiple locations in the US or from the UK, depending on stock availability.

- Softcover
- Print on Demand
Seller: Grand Eagle Retail, Bensenville, U.S.A.Grand Eagle Retail
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Paperback. Condition: new. Paperback. Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of fr…eestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing. The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This item is printed on demand. Shipping may be from multiple locations in the US or from the UK, depending on stock availability.