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Materials Science of Microelectromechanical Systems (Mems) Devices Ii: Volume 605 (MRS Proceedings) - Softcover
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The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 (MRS Proceedings)
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Cambridge University Press, 2014
ISBN 10: 1107413214
ISBN 13: 9781107413214
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Seller: California Books, Miami, FL, U.S.A.
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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605
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Cambridge University Press, GB, 2014
ISBN 10: 1107413214
ISBN 13: 9781107413214
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Paperback
Seller: Rarewaves.com USA, London, LONDO, United Kingdom
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Paperback. Condition: New. Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing. Seller Inventory # LU-9781107413214
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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 (MRS Proceedings)
Published by
Cambridge University Press, 2014
ISBN 10: 1107413214
ISBN 13: 9781107413214
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Softcover
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Materials Science of Microelectromechanical Systems (Mems) Devices Ii: Volume 605 (MRS Proceedings)
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Cambridge University Press 2014-06-05, 2014
ISBN 10: 1107413214
ISBN 13: 9781107413214
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Paperback. Condition: New. Seller Inventory # 6666-IUK-9781107413214
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Materials Science of Microelectromechanical Systems (Mems) Devices Ii: Volume 605 (MRS Proceedings)
Published by
Cambridge University Press, 2014
ISBN 10: 1107413214
ISBN 13: 9781107413214
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Softcover
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Materials Science of Microelectromechanical Systems Devices II
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Cambridge University Press CUP, 2014
ISBN 10: 1107413214
ISBN 13: 9781107413214
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Materials Science of Microelectromechanical Systems Devices II
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Cambridge University Press, 2014
ISBN 10: 1107413214
ISBN 13: 9781107413214
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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605
Published by
Cambridge University Press, 2014
ISBN 10: 1107413214
ISBN 13: 9781107413214
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Paperback / softback. Condition: New. This item is printed on demand. New copy - Usually dispatched within 5-9 working days. Seller Inventory # C9781107413214
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Materials Science of Microelectromechanical Systems (Mems) Devices Ii: Volume 605 (MRS Proceedings)
Published by
Cambridge University Press, 2014
ISBN 10: 1107413214
ISBN 13: 9781107413214
New
Softcover
Seller: Kennys Bookstore, Olney, MD, U.S.A.
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Materials Science of Microelectromechanical Systems Devices II
Published by
Cambridge University Press, 2014
ISBN 10: 1107413214
ISBN 13: 9781107413214
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Softcover
Seller: Biblios, Frankfurt am main, HESSE, Germany
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Condition: New. PRINT ON DEMAND pp. 334. Seller Inventory # 1897804394