Micro Mechanical Systems Principles (10 results)
- Hardcover
Seller: Anybook.com, Lincoln, United KingdomAnybook.com
Contact seller5-star sellerCondition: Used - Good
£ 21.56
£ 13.60 shippingShips from United Kingdom to U.S.A.Quantity: 1 available
Condition: Good. Volume 6. This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. In good all round condition. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,700grams, ISBN:0444823638.
- More images
- Hardcover
Seller: Roland Antiquariat UG haftungsbeschränkt, Weinheim, GermanyRoland Antiquariat UG haftungsbeschränkt
Contact seller5-star sellerCondition: Used
£ 76.43
£ 35.86 shippingShips from Germany to U.S.A.Quantity: 1 available
Hardcover: 17.8 x 1.9 x 23 cm. Illustrated. 276 p. Neu und originalverschweißt! --- Brand new and welded! 9780444823632 Sprache: Englisch Gewicht in Gramm: 662.
- Hardcover
Seller: Buchpark, Trebbin, GermanyBuchpark
Contact seller5-star sellerCondition: Used - Very good
£ 55.97
£ 89.66 shippingShips from Germany to U.S.A.Quantity: 1 available
Condition: Gut. Zustand: Gut | Seiten: 276 | Sprache: Englisch | Produktart: Bücher | Keine Beschreibung verfügbar.
- Hardcover
Seller: Buchpark, Trebbin, GermanyBuchpark
Contact seller5-star sellerCondition: Used - Fine
£ 57.65
£ 89.66 shippingShips from Germany to U.S.A.Quantity: 1 available
Condition: Sehr gut. Zustand: Sehr gut | Seiten: 276 | Sprache: Englisch | Produktart: Bücher | Keine Beschreibung verfügbar.
- Hardcover
Seller: Chiron Media, Wallingford, United KingdomChiron Media
Contact seller5-star sellerCondition: New
£ 147.98
£ 15.49 shippingShips from United Kingdom to U.S.A.Quantity: Over 20 available
Hardcover. Condition: New.
- Hardcover
Seller: Revaluation Books, Exeter, United KingdomRevaluation Books
Contact seller5-star sellerCondition: New
£ 165.54
£ 12.50 shippingShips from United Kingdom to U.S.A.Quantity: 2 available
Hardcover. Condition: Brand New. 1st edition. 276 pages. 10.00x7.00x0.75 inches. In Stock.
- Hardcover
Seller: BUCHSERVICE / ANTIQUARIAT Lars Lutzer, Wahlstedt, GermanyBUCHSERVICE / ANTIQUARIAT Lars Lutzer
Contact seller5-star sellerCondition: Used - Very good
£ 228.58
£ 34.11 shippingShips from Germany to U.S.A.Quantity: 1 available
Condition: gut. 1998. Micro Mechanical Systems: Principles and Technology (Volume 6) (Handbook of Sensors and Actuators, Volume 6, Band 6) In englischer Sprache. pages.
- Softcover
Seller: Revaluation Books, Exeter, United KingdomRevaluation Books
Contact seller5-star sellerCondition: New
£ 252.57
£ 12.50 shippingShips from United Kingdom to U.S.A.Quantity: 1 available
Paperback. Condition: Brand New. 280 pages. 9.40x6.50x0.64 inches. In Stock.
- Hardcover
- Print on Demand
Seller: Basi6 International, Irving, TX, U.S.A.Basi6 International
Contact seller5-star sellerCondition: New
£ 146.51
Free ShippingShips within U.S.A.Quantity: Over 20 available
Condition: Brand New. New. US edition. Print on demand title. Delivery takes 20-25 days. Excellent Customer Service.
- Hardcover
- Print on Demand
Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH
Contact seller5-star sellerCondition: New
£ 172.58
£ 54.05 shippingShips from Germany to U.S.A.Quantity: 2 available
Buch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems,…and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.


