Refine your search

  • Books (7)

to

Custom price range (£)

to

Micro Mechanical Systems Principles (7 results)

Title: 
Refine with Advanced Search
  • Language: English

    Published by Elsevier, 1998

    0444823638 / 9780444823632

    • Hardcover

    Seller: Anybook.com, Lincoln, United KingdomAnybook.com

    5-star seller
    Contact seller

    Condition: Used - Good

    £ 21.56

    £ 13.22 shipping 
    Ships from United Kingdom to U.S.A.

    Quantity: 1 available

    Condition: Good. Volume 6. This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. In good all round condition. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,700grams, ISBN:0444823638. …

  • Language: English

    Published by Elsevier Science, 1998

    0444823638 / 9780444823632

    • Hardcover

    Seller: Roland Antiquariat UG haftungsbeschränkt, Weinheim, GermanyRoland Antiquariat UG haftungsbeschränkt

    5-star seller
    Contact seller

    Condition: Used

    £ 74.82

    £ 35.11 shipping 
    Ships from Germany to U.S.A.

    Quantity: 1 available

    Hardcover: 17.8 x 1.9 x 23 cm. Illustrated. 276 p. Neu und originalverschweißt! --- Brand new and welded! 9780444823632 Sprache: Englisch Gewicht in Gramm: 662.

  • Language: English

    Published by ELSEVIER SCIENCE & TECHNOLOGY, 1998

    0444823638 / 9780444823632

    • Hardcover

    Seller: Buchpark, Trebbin, GermanyBuchpark

    5-star seller
    Contact seller

    Condition: Used - Very good

    £ 65.37

    £ 87.77 shipping 
    Ships from Germany to U.S.A.

    Quantity: 1 available

    Condition: Gut. Zustand: Gut | Seiten: 276 | Sprache: Englisch | Produktart: Bücher | Keine Beschreibung verfügbar.

  • Language: English

    Published by ELSEVIER SCIENCE & TECHNOLOGY, 1998

    0444823638 / 9780444823632

    • Hardcover

    Seller: Buchpark, Trebbin, GermanyBuchpark

    5-star seller
    Contact seller

    Condition: Used - Fine

    £ 67.95

    £ 87.77 shipping 
    Ships from Germany to U.S.A.

    Quantity: 1 available

    Condition: Sehr gut. Zustand: Sehr gut | Seiten: 276 | Sprache: Englisch | Produktart: Bücher | Keine Beschreibung verfügbar.

  • Language: English

    Published by Elsevier Science, 1998

    0444823638 / 9780444823632

    • Hardcover

    Seller: BUCHSERVICE / ANTIQUARIAT Lars Lutzer, Wahlstedt, GermanyBUCHSERVICE / ANTIQUARIAT Lars Lutzer

    5-star seller
    Contact seller

    Condition: Used - Very good

    £ 223.76

    £ 33.39 shipping 
    Ships from Germany to U.S.A.

    Quantity: 1 available

    Condition: gut. 1998. Micro Mechanical Systems: Principles and Technology (Volume 6) (Handbook of Sensors and Actuators, Volume 6, Band 6) In englischer Sprache. pages.

  • Language: English

    Published by Elsevier Science, 2015

    0444551107 / 9780444551108

    • Softcover

    Seller: Revaluation Books, Exeter, United KingdomRevaluation Books

    5-star seller
    Contact seller

    Condition: New

    £ 252.57

    £ 12.50 shipping 
    Ships from United Kingdom to U.S.A.

    Quantity: 1 available

    Paperback. Condition: Brand New. 280 pages. 9.40x6.50x0.64 inches. In Stock.

  • Language: English

    Published by Elsevier Science, 1998

    0444823638 / 9780444823632

    • Hardcover
    • Print on Demand

    Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH

    5-star seller
    Contact seller

    Condition: New

    £ 183.26

    £ 29.26 shipping 
    Ships from Germany to U.S.A.

    Quantity: 2 available

    Buch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.…