Micro Mechanical Systems : Principles and Technology
Language: English
Published by Elsevier Science, 1998
- Hardcover
- New
Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH
AbeBooks seller since August 14, 2006
Condition: New
£ 233.44
Quantity: 2 available
Add to basketItem description from seller
nach der Bestellung gedruckt Neuware - Printed after ordering - In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.…
Seller Inventory # 9780444823632
- Title
- Micro Mechanical Systems : Principles and Technology
- Author
- T. Fukuda
- Publisher
- Elsevier Science
- Publication year
- 1998
- Condition
- Neu
- Binding
- Buch
- Language
- English
- ISBN 10
- 0444823638
- ISBN 13
- 9780444823632
- Item weight
- 660 grams
- Dimensions
- 244x168x16 mm
"Synopsis" may belong to another edition of this title.
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| Item | 5 to 7 business days | 7 to 10 business days |
|---|---|---|
| First item | £ 26.09 | £ 26.09 |
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Einbeck, Germany 37574
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represented by the managing director Christel Glass
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