Microlithography Fundamentals in Semiconductor Devices & Fabrication Technology

Ito Toshio Takumi Ueno Nonogaki Saburo

ISBN 10: 0824799518 ISBN 13: 9780824799519

Published by Taylor & Francis Group, 1998

Language: English

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Bibliographic Details

Title

Microlithography Fundamentals in Semiconductor Devices & Fabrication Technology

Publisher

Taylor & Francis Group

Publication Date

1998

Language

English

ISBN 10

0824799518

ISBN 13

9780824799519

Binding

Hardcover

Condition

New

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About this title

Synopsis

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

About the Author

Saburo Nonogaki, Ueno Takumi, Toshio Ito

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