Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering) - Hardcover

Nonogaki, Saburo; Takumi, Ueno; Ito, Toshio

 
9780824799519: Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology (Plastics Engineering)
Hardcover
ISBN 10: 0824799518 ISBN 13: 9780824799519
Publisher: CRC Press, 1998

Synopsis

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

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About the Author

Saburo Nonogaki, Ueno Takumi, Toshio Ito

"About this title" may belong to another edition of this title.

Publisher
CRC Press
Publication date
1998
Language
English
ISBN 10 
0824799518
ISBN 13 
9780824799519
Binding
Hardcover
Edition number
1
Number of pages
336

Other Popular Editions of the Same Title

9781420001457: Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

Featured Edition

ISBN 10:  1420001450 ISBN 13:  9781420001457
Publisher: CRC Press Inc, 1998
Hardcover