Scanning Electron Microscopy: Physics of Image Formation and Microanalysis - Softcover
Book 55 of 234: Springer Series in Optical Sciences
Synopsis
1. Introduction.- 2. Electron Optics of a Scanning Electron Microscope.- 3. Electron Scattering and Diffusion.- 4. Emission of Electrons and X-Ray Quanta.- 5. Detectors and Signal Processing.- 6. Imaging with Secondary and Backscattered Electrons.- 7. Electron-Beam-Induced Current, Cathodoluminescence and Special Techniques.- 8. Crystal Structure Analysis by Diffraction.- 9. Elemental Analysis and Imaging with X-Rays.- References.
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