Scanning Electron Microscopy: Physics of Image Formation and Microanalysis - Hardcover

Reimer, Ludwig

Hardcover

ISBN 10: 3540135308 ISBN 13: 9783540135302

Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. K, 1985

Synopsis

Scanning Electron Microscopy provides a description of the physics of electron-probe formation and of electron-specimen interactions. The different imaging and analytical modes using secondary and backscattered electrons, electron-beam-induced currents, X-ray and Auger electrons, electron channelling effects, and cathodoluminescence are discussed to evaluate specific contrasts and to obtain quantitative information.

About this title

Review

"...this book is both linguistically and scientifically outstanding. It is an inspiring book for beginners and experienced SEM operators alike. The list of references is especially useful. This volume makes an outstanding contribution to the deeper understanding of the SEM."

T Mulvey, Measurement Science and Technology. 11, No12, December 2000

Edition details

• Publisher: Springer-Verlag Berlin and Heidelberg GmbH & Co. K
• Publication date: 1985
• ISBN 10: 3540135308
• ISBN 13: 9783540135302
• Binding: Hardcover
• Language: English
• Number of pages: 457