Wafer Bonding: Applications and Technology: 75 (Springer Series in Materials Science, 75) - Hardcover

Book 57 of 233: Springer Series in Materials Science
 
9783540210498: Wafer Bonding: Applications and Technology: 75 (Springer Series in Materials Science, 75)

Synopsis

During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

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From the Back Cover

During the past decade direct wafer bonding has developed into a mature materials integration technology. This book presents state-of-the-art reviews of the most important applications of wafer bonding written by experts from industry and academia. The topics include bonding-based fabrication methods of silicon-on-insulator, photonic crystals, VCSELs, SiGe-based FETs, MEMS together with hybrid integration and laser lift-off. The non-specialist will learn about the basics of wafer bonding and its various application areas, while the researcher in the field will find up-to-date information about this fast-moving area, including relevant patent information.

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9783642059155: Wafer Bonding: Applications and Technology: 75 (Springer Series in Materials Science, 75)

Featured Edition

ISBN 10:  3642059155 ISBN 13:  9783642059155
Publisher: Springer, 2011
Softcover