Fundamental Principles of Optical Lithography (Paperback)
Language: English
Published by John Wiley & Sons Inc, New York, 2007
- First Edition
- Softcover
- New
Seller: Grand Eagle Retail, Bensenville, IL, U.S.A.Grand Eagle Retail
AbeBooks seller since October 12, 2005
Condition: New
£ 57.33
Quantity: 1 available
Add to basketItem description from seller
Paperback. The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB, to accompany the textbook. You can also contact the author and find help for instructors. Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter. Shipping may be from multiple locations in the US or from the UK, depending on stock availability.…
Seller Inventory # 9780470727300
- Title
- Fundamental Principles of Optical Lithography (Paperback)
- Author
- Chris Mack
- Publisher
- John Wiley & Sons Inc, New York
- Publication year
- 2007
- Condition
- new
- Binding
- Paperback
- Language
- English
- ISBN 10
- 0470727306
- ISBN 13
- 9780470727300
- Edition
- 1st Edition
By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.
This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.
Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
"Synopsis" may belong to another edition of this title.
About the Author
Chris A. Mack, Vice-President of Lithography Technology, Lithoguru.com.
"About the title" may belong to another edition of this title.
Grand Eagle Retail
Bensenville, IL, U.S.A.
AbeBooks seller since October 12, 2005
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