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Synopsis
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components.
By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate.
This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.
Additional Information:
Visiting http://www.lithoguru.com/textbook/index.html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.
"synopsis" may belong to another edition of this title.
About the Author
Chris A. Mack, Vice-President of Lithography Technology, Lithoguru.com.
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Fundamental Principles of Optical Lithography: The Science of Microfabrication
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Fundamental Principles of Optical Lithography
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Condition: Bueno. : Este libro presenta un tratamiento teórico y práctico completo del tema de la litografía para estudiantes e investigadores. Comprende diez capítulos detallados más tres apéndices con problemas al final de cada capítulo. El libro aborda la fabricación de circuitos integrados, que requiere una variedad de procesos físicos y químicos que se realizan en un sustrato semiconductor. En general, estos procesos se dividen en tres categorías: deposición de película, patrones y dopaje de semiconductores. Se utilizan películas de conductores y aislantes para conectar y aislar los transistores y sus componentes. EAN: 9780470727300 Tipo: Libros Categoría: Tecnología Título: Fundamental Principles of Optical Lithography Autor: Chris Mack Editorial: Wiley Idioma: en Páginas: 544 Formato: tapa blanda. Seller Inventory # Happ-2026-07-03-14ce3bff
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Fundamental Principles of Optical Lithography: The Science of Microfabrication
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Fundamental Principles of Optical Lithography (Paperback)
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Paperback. Condition: new. Paperback. The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. Films of both conductors and insulators are used to connect and isolate transistors and their components. By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. Fundamental to all of these processes is lithography, ie, the formation of three-dimensional relief images on the substrate for subsequent transfer of the pattern to the substrate. This book presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter. Additional Information: Visiting html enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB, to accompany the textbook. You can also contact the author and find help for instructors. Fundamental Principles of Optical Lithography: The Science of Microfabrication presents a complete theoretical and practical treatment of the topic of lithography for both students and researchers. This sole-authored text includes optional computer simulation exercises as well as problems at the end of each chapter. Shipping may be from multiple locations in the US or from the UK, depending on stock availability. Seller Inventory # 9780470727300
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