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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 (MRS Proceedings)
Language: English
Published by Cambridge University Press, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Condition: New.
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Materials science of microelectromechanical systems (MEMS) devices. Symposium held December 1 - 2, 1998, Boston, Massachusetts, U.S.A.
Language: English
Published by Warrendale, Pa., Materials Research Society, 1999
ISBN 10: 1558994521 ISBN 13: 9781558994522
Hardcover. 246 S. Ehem. Bibliotheksexemplar mit Bib.-Signatur und Stempel in GUTEM Zustand. Kaum Gebrauchsspuren. 1558994521 Sprache: Englisch Gewicht in Gramm: 550.
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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 (MRS Proceedings)
Language: English
Published by Cambridge University Press, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Seller: Ria Christie Collections, Uxbridge, United Kingdom
Seller rating 5 out of 5 stars
£ 32.38
£ 11.98 shipping
Ships from United Kingdom to U.S.A.Quantity: Over 20 available
Add to basketCondition: New. In.
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Materials Science of Microelectromechanical Systems (Mems) Devices Ii: Volume 605 (MRS Proceedings)
Language: English
Published by Cambridge University Press 2014-06-05, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
£ 29.98
£ 15.49 shipping
Ships from United Kingdom to U.S.A.Quantity: Over 20 available
Add to basketPaperback. Condition: New.
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Materials Science of Microelectromechanical Systems (Mems) Devices Ii: Volume 605 (MRS Proceedings)
Language: English
Published by Cambridge University Press, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Seller: Kennys Bookshop and Art Galleries Ltd., Galway, GY, Ireland
Seller rating 5 out of 5 stars
Condition: New.
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Materials Science of Microelectromechanical Systems Devices II
Language: English
Published by Cambridge University Press CUP, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Condition: New. pp. 334.
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Materials Science of Microelectromechanical Systems (Mems) Devices Ii: Volume 605 (MRS Proceedings)
Language: English
Published by Cambridge University Press, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Condition: New.
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Materials Science of Microelectromechanical Systems (Mems) Devices II : Volume 605
Language: English
Published by Cambridge University Press, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Taschenbuch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing.
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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605
Language: English
Published by Cambridge University Press, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Paperback. Condition: Brand New. 1st edition. 334 pages. 9.02x5.98x0.71 inches. In Stock. This item is printed on demand.
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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605
Language: English
Published by Cambridge University Press, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Seller: THE SAINT BOOKSTORE, Southport, United Kingdom
Seller rating 5 out of 5 stars
£ 34.53
£ 15.25 shipping
Ships from United Kingdom to U.S.A.Quantity: Over 20 available
Add to basketPaperback / softback. Condition: New. This item is printed on demand. New copy - Usually dispatched within 5-9 working days.
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Materials Science of Microelectromechanical Systems Devices II
Language: English
Published by Cambridge University Press, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Condition: New. Print on Demand pp. 334.
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Materials Science of Microelectromechanical Systems Devices II
Language: English
Published by Cambridge University Press, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Condition: New. PRINT ON DEMAND pp. 334.
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Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605 (Paperback)
Language: English
Published by Cambridge University Press, Cambridge, 2014
ISBN 10: 1107413214 ISBN 13: 9781107413214
Paperback. Condition: new. Paperback. Microelectromechanical systems (MEMS) hold great promise for sensing and actuating on the micron scale. There is a hierarchy of increasing difficulty for placing MEMS devices in the field. Devices that do not allow contact between structural members rely mainly on mechanical properties of freestanding films. High-resolution techniques must be developed within the framework of MEMS to measure properties such as modulus and residual stress. When contact and rubbing contact are allowed, the complexities of adhesion and friction at the microscale must be understood and well controlled. Fluid interactions are similarly important for microfluidic devices. Packaging of MEMS for use in the field also requires special consideration, because it is often application specific. This book investigates various materials, characterization methods and processing techniques. These approaches represent different but useful strategies to solve MEMS challenges, and must be integrated for product realization. Topics include: deposition and characterization of Si; materials and processes for MEMS; tribology; dynamic optical characterization; packaging; LIGA; materials aspects; and characterization of MEMS processing. The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This item is printed on demand. Shipping may be from our UK warehouse or from our Australian or US warehouses, depending on stock availability.
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Materials Science of Microelectromechanical Systems (Mems) Devices II
Language: English
Published by Cambridge University Press, 2012
ISBN 10: 1107413214 ISBN 13: 9781107413214
Condition: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.KlappentextThe MRS Symposium Proceeding series is an internationally recognised reference suitable for research.
