ISBN: 9783662443941 - Micro and Nano Fabrication: Tools and Processes (8 results)

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  • Language: English

    Published by Heidelberg/New York, NY/Dordrecht/London/Berlin, Springer., 2015

    3662443945 / 9783662443941

    • Hardcover

    Seller: Universitätsbuchhandlung Herta Hold GmbH, Berlin, GermanyUniversitätsbuchhandlung Herta Hold GmbH

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    24 cm. XXVI, 519 p. Hardcover. Versand aus Deutschland / We dispatch from Germany via Air Mail. Einband bestoßen, daher Mängelexemplar gestempelt, sonst sehr guter Zustand. Imperfect copy due to slightly bumped cover, apart from this in very good condition. Stamped. Sprache: Englisch.

  • Language: English

    Published by Springer, 2015

    3662443945 / 9783662443941

    • Hardcover

    Seller: GreatBookPrices, Columbia, MD, U.S.A.GreatBookPrices

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    Condition: As New. Unread book in perfect condition.

  • Language: English

    Published by Springer, 2015

    3662443945 / 9783662443941

    • Hardcover

    Seller: GreatBookPrices, Columbia, MD, U.S.A.GreatBookPrices

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  • Language: English

    Published by Springer, 2015

    3662443945 / 9783662443941

    • Hardcover

    Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH

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    Buch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.…

  • Language: English

    Published by Springer Verlag, 2015

    3662443945 / 9783662443941

    • Hardcover

    Seller: Revaluation Books, Exeter, United KingdomRevaluation Books

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    Hardcover. Condition: Brand New. 2015 edition. 519 pages. 9.30x6.40x1.40 inches. In Stock.

  • Language: English

    Published by Springer Berlin Heidelberg Jan 2015, 2015

    3662443945 / 9783662443941

    • Hardcover
    • Print on Demand

    Seller: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, GermanyBuchWeltWeit Ludwig Meier e.K.

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    Buch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control. 548 pp. Englisch.…

  • Language: English

    Published by Springer Berlin Heidelberg, 2015

    3662443945 / 9783662443941

    • Hardcover
    • Print on Demand

    Seller: moluna, Greven, Germanymoluna

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    Gebunden. Condition: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. Describes the tools required for fabricating MNEMS systemsGives insight into the process technologiesFits for practitioners and students of MNEMSDescribes the tools required for fabricating MNEMS systemsGives insight into .…

  • Language: English

    Published by Springer, Springer Jan 2015, 2015

    3662443945 / 9783662443941

    • Hardcover
    • Print on Demand

    Seller: buchversandmimpf2000, Emtmannsberg, BAYE, Germanybuchversandmimpf2000

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    Buch. Condition: Neu. This item is printed on demand - Print on Demand Titel. Neuware -For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.Springer-Verlag KG, Sachsenplatz 4-6, 1201 Wien 548 pp. Englisch.…