9780792301547 - Microelectronic Materials and Processes: 164 (nato Science Series E:, 164) (5 results)
- Softcover
Seller: Buchpark, Trebbin, GermanyBuchpark
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£ 348.73
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Condition: Sehr gut. Zustand: Sehr gut | Seiten: 1000 | Sprache: Englisch | Produktart: Bücher | The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher speed, and consume lower power. The fabrication of integrated circuits containing in excess of fo…ur million components per chip with design rules in the submicron range has now been made possible by the introduction of innovative circuit designs and the development of new microelectronic materials and processes. This book addresses the latter challenge by assessing the current status of the science and technology associated with the production of VLSI silicon circuits. It represents the cumulative effort of experts from academia and industry who have come together to blend their expertise into a tutorial overview and cohesive update of this rapidly expanding field. A balance of fundamental and applied contributions cover the basics of microelectronics materials and process engineering. Subjects in materials science include silicon, silicides, resists, dielectrics, and interconnect metallization. Subjects in process engineering include crystal growth, epitaxy, oxidation, thin film deposition, fine-line lithography, dry etching, ion implantation, and diffusion. Other related topics such as process simulation, defects phenomena, and diagnostic techniques are also included. This book is the result of a NATO-sponsored Advanced Study Institute (AS!) held in Castelvecchio Pascoli, Italy. Invited speakers at this institute provided manuscripts which were edited, updated, and integrated with other contributions solicited from non-participants to this AS..
- Softcover
Seller: Ria Christie Collections, Uxbridge, United KingdomRia Christie Collections
Contact seller5-star sellerCondition: New
£ 465.52
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Condition: New. In English.
- Softcover
Seller: moluna, Greven, Germanymoluna
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£ 528.28
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Kartoniert / Broschiert. Condition: New. Proceedings of the NATO Advanced Study Institute, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986 The primary thrust of very large scale integration (VLS!) is the miniaturization of devices to increase packing density, achieve higher spe.
- Softcover
Seller: Revaluation Books, Exeter, United KingdomRevaluation Books
Contact seller5-star sellerCondition: New
£ 684.86
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Paperback. Condition: Brand New. 1st edition. 985 pages. 9.20x6.40x1.80 inches. In Stock.
- Softcover
- Print on Demand
Seller: Basi6 International, Irving, TX, U.S.A.Basi6 International
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£ 345.87
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Condition: Brand New. New. US edition. Print on demand title. Delivery takes 20-25 days.
