A User's Guide to Ellipsometry (Paperback)

Language: English

Published by Dover Publications Inc., New York, 2006

0486450287 / 9780486450285

Series: Book 37 of 53 - Dover Civil and Mechanical Engineering

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Seller: CitiRetail, Stevenage, United KingdomCitiRetail

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Paperback. This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry - particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references. Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition. This item is printed on demand. Shipping may be from our UK warehouse or from our Australian or US warehouses, depending on stock availability.…

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Title
A User's Guide to Ellipsometry (Paperback)
Author
Harland G. Tompkins
Publisher
Dover Publications Inc., New York
Publication year
2006
Condition
new
Binding
Paperback
Language
English
ISBN 10
0486450287
ISBN 13
9780486450285
Series
Book 37 of 53: Dover Civil and Mechanical Engineering

CitiRetail

Stevenage, United Kingdom

5-star seller

AbeBooks seller since June 29, 2022

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