A User's Guide to Ellipsometry (Paperback)
Language: English
Published by Dover Publications Inc., New York, 2006
Series: Book 37 of 53 - Dover Civil and Mechanical Engineering
- Softcover
- New
Seller: AussieBookSeller, Truganina, VIC, AustraliaAussieBookSeller
AbeBooks seller since June 22, 2007
Condition: New
£ 19.82
Quantity: 1 available
Add to basketItem description from seller
Paperback. This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry - particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth.A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references. Text for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. 1993 edition. This item is printed on demand. Shipping may be from our Sydney, NSW warehouse or from our UK or US warehouse, depending on stock availability.…
Seller Inventory # 9780486450285
- Title
- A User's Guide to Ellipsometry (Paperback)
- Author
- Harland G. Tompkins
- Publisher
- Dover Publications Inc., New York
- Publication year
- 2006
- Condition
- new
- Binding
- Paperback
- Language
- English
- ISBN 10
- 0486450287
- ISBN 13
- 9780486450285
- Series
- Book 37 of 53: Dover Civil and Mechanical Engineering
"Synopsis" may belong to another edition of this title.
AussieBookSeller
Truganina, VIC, Australia
AbeBooks seller since June 22, 2007
Shipping rates from Australia to U.S.A.
| Item | 25 to 45 business days | 8 to 14 business days |
|---|---|---|
| First item | £ 27.69 | £ 32.93 |
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The Nile Group Pty Ltd
42 Apex Drive
Truganina, VIC Australia 3029
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