The Physics of Submicron Lithography
Language: English
Published by Humana, 1992
- Hardcover
- New
Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH
AbeBooks seller since August 14, 2006
Condition: New
£ 208.47
Quantity: 1 available
Add to basketItem description from seller
nach der Bestellung gedruckt Neuware - Printed after ordering - This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer. The smallest dimensions of the device components are limited by the diffraction of the light when the pattern is transferred and are approximately the same as the wavelength of the light. Photolithography by light having a wavelength of A ~ 0.4 flm has made it possible to serially produce integrated circuits having devices whose minimal size is 2-3 flm in the 4 pattern and having 10-105 transistors per circuit. …
Seller Inventory # 9780306435782
- Title
- The Physics of Submicron Lithography
- Author
- Kamil A. Valiev
- Publisher
- Humana
- Publication year
- 1992
- Condition
- Neu
- Binding
- Buch
- Language
- English
- ISBN 10
- 0306435780
- ISBN 13
- 9780306435782
- Item weight
- 1,141 grams
- Dimensions
- 260x183x33 mm
"Synopsis" may belong to another edition of this title.
Synopsis
"About the title" may belong to another edition of this title.
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| Item | 7 to 10 business days | 5 to 7 business days |
|---|---|---|
| First item | £ 35.99 | £ 49.13 |
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