Items related to The Physics of Submicron Lithography (Microdevices)
Synopsis
This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer. The smallest dimensions of the device components are limited by the diffraction of the light when the pattern is transferred and are approximately the same as the wavelength of the light. Photolithography by light having a wavelength of A ~ 0.4 flm has made it possible to serially produce integrated circuits having devices whose minimal size is 2-3 flm in the 4 pattern and having 10-105 transistors per circuit.
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Synopsis
This monograph details the physics behind the methods of generating submicron forms for electron beam, ion beam, optical, and X-ray lithography. The topics are discussed at the level of analytical theory, allowing a study of scientific issues in the field without frequent reference to a general physics text.
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The Physics Of Submicron Lithography
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Plenum Press, New York, 1992
ISBN 10: 0306435780
ISBN 13: 9780306435782
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Condition: Fine. 1st edition. Laminated boards, F. xii+493pp, text figs, index, a fine copy, as new. Standard text on the physics of electron beam, ion beam, optical & x ray lithography. The book is intended for specialists who are developing or using methods of processing materials into a device whose components are submicron in size. 1100 grams. Seller Inventory # 31144
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The Physics of Submicron Lithography
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Gebunden. Condition: New. Dieser Artikel ist ein Print on Demand Artikel und wird nach Ihrer Bestellung fuer Sie gedruckt. This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully . Seller Inventory # 5901714
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Physics of Submicron Lithography
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The Physics of Submicron Lithography
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Buch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer. The smallest dimensions of the device components are limited by the diffraction of the light when the pattern is transferred and are approximately the same as the wavelength of the light. Photolithography by light having a wavelength of A ~ 0.4 flm has made it possible to serially produce integrated circuits having devices whose minimal size is 2-3 flm in the 4 pattern and having 10-105 transistors per circuit. 516 pp. Englisch. Seller Inventory # 9780306435782
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Physics of Submicron Lithography
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The Physics of Submicron Lithography
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Buch. Condition: Neu. The Physics of Submicron Lithography | Kamil A. Valiev | Buch | Microdevices | xi | Englisch | 1992 | Springer | EAN 9780306435782 | Verantwortliche Person für die EU: Springer Verlag GmbH, Tiergartenstr. 17, 69121 Heidelberg, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu Print on Demand. Seller Inventory # 101980407
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The Physics of Submicron Lithography (Microdevices)
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The Physics of Submicron Lithography
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Springer, Springer Mär 1992, 1992
ISBN 10: 0306435780
ISBN 13: 9780306435782
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Buch. Condition: Neu. This item is printed on demand - Print on Demand Titel. Neuware -This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer. The smallest dimensions of the device components are limited by the diffraction of the light when the pattern is transferred and are approximately the same as the wavelength of the light. Photolithography by light having a wavelength of A ~ 0.4 flm has made it possible to serially produce integrated circuits having devices whose minimal size is 2-3 flm in the 4 pattern and having 10-105 transistors per circuit.Springer-Verlag KG, Sachsenplatz 4-6, 1201 Wien 508 pp. Englisch. Seller Inventory # 9780306435782
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The Physics of Submicron Lithography
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Buch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - This book is devoted to the physics of electron-beam, ion-beam, optical, and x-ray lithography. The need for this book results from the following considerations. The astonishing achievements in microelectronics are in large part connected with successfully applying the relatively new technology of processing (changing the prop erties of) a material into a device whose component dimensions are submicron, called photolithography. In this method the device is imaged as a pattern on a metal film that has been deposited onto a transparent substrate and by means of a broad stream of light is transferred to a semiconductor wafer within which the physical structure of the devices and the integrated circuit connections are formed layer by layer. The smallest dimensions of the device components are limited by the diffraction of the light when the pattern is transferred and are approximately the same as the wavelength of the light. Photolithography by light having a wavelength of A ~ 0.4 flm has made it possible to serially produce integrated circuits having devices whose minimal size is 2-3 flm in the 4 pattern and having 10-105 transistors per circuit. Seller Inventory # 9780306435782