Optical Imaging in Projection Microlithography

Language: English

Published by SPIE Press, US, 2005

0819458295 / 9780819458292

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Seller: Rarewaves.com UK, London, United KingdomRarewaves.com UK

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Softcover

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Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.

Seller Inventory # LU-9780819458292

Title
Optical Imaging in Projection Microlithography
Author
Alfred K. Wong
Publisher
SPIE Press, US
Publication year
2005
Condition
New
Binding
Paperback
Language
English
ISBN 10
0819458295
ISBN 13
9780819458292
Edition
illustrated Edition.
Item weight
585 grams

Rarewaves.com UK

London, United Kingdom

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