Optical Imaging in Projection Microlithography
Alfred K. Wong
ISBN 10: 0819458295 ISBN 13: 9780819458292
Published by SPIE Press, 2005
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Here for the first time is an integrated mathematical view of the physics and numerical modeling of optical projection lithography that efficiently covers the full spectrum of the important concepts. Alfred Wong offers rigorous underpinning, clarity in systematic formulation, physical insight into emerging ideas, as well as a system level view of the parameter tolerances required in manufacturing. Readers with a good working knowledge of calculus can follow the step-by-step development, and technologists can gather general concepts and the key equations that result. Even the casual reader will gain a perspective on the key concepts, which will likely help facilitate dialog among technologists.
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Bibliographic Details
Title: Optical Imaging in Projection ...
Publisher: SPIE Press
Publication Date: 2005
Binding: Paperback / softback
Condition: New
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Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)
Published by
Society of Photo Optical, 2005
ISBN 10: 0819458295
ISBN 13: 9780819458292
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Paperback
Seller: Revaluation Books, Exeter, United Kingdom
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Paperback. Condition: Brand New. illustrated edition. 276 pages. 9.75x6.75x0.50 inches. In Stock. Seller Inventory # __0819458295
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Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)
Seller: Kennys Bookshop and Art Galleries Ltd., Galway, GY, Ireland
Seller rating 5 out of 5 stars
Condition: New. An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective. Series: Tutorial Texts. Num Pages: 276 pages, Illustrations. BIC Classification: TJFC; TTB. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 253 x 181 x 18. Weight in Grams: 662. . 2005. illustrated edition. Paperback. . . . . Seller Inventory # V9780819458292
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Optical Imaging in Projection Microlithography (SPIE Tutorial Texts in Optical Engineering Vol. TT66)
Seller: Kennys Bookstore, Olney, MD, U.S.A.
Seller rating 4 out of 5 stars
Condition: New. An integrated mathematical view of the physics and numerical modeling of optical projection lithography that covers the full spectrum of the important concepts. Readers with a good working knowledge of calculus can follow the development, technologists can gather concepts and the equations that result. The casual reader will gain a perspective. Series: Tutorial Texts. Num Pages: 276 pages, Illustrations. BIC Classification: TJFC; TTB. Category: (P) Professional & Vocational; (UP) Postgraduate, Research & Scholarly. Dimension: 253 x 181 x 18. Weight in Grams: 662. . 2005. illustrated edition. Paperback. . . . . Books ship from the US and Ireland. Seller Inventory # V9780819458292