Microlithography Fundamentals in Semiconductor Devices & Fabrication Technology

Ito Toshio Takumi Ueno Nonogaki Saburo

ISBN 10: 0824799518 / ISBN 13: 9780824799519

Published by Taylor & Francis Group, 1998

About this Item

pp. 336.

Seller Inventory # 181527885

Bibliographic Details

• Title: Microlithography Fundamentals in Semiconductor Devices & Fabrication Technology
• Publisher: Taylor & Francis Group
• Publication Date: 1998
• Language: English
• ISBN 10: 0824799518
• ISBN 13: 9780824799519
• Binding: Hardcover
• Condition: New

About this title

Synopsis

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

About the Author

Saburo Nonogaki, Ueno Takumi, Toshio Ito