Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology

Nonogaki, Saburo (Author)/ Takumi, Ueno (Author)/ Ito, Toshio (Author)

ISBN 10: 0824799518 / ISBN 13: 9780824799519

Published by Marcel Dekker Inc, 1998

About this Item

illustrated edition. 327 pages. 9.50x6.50x0.75 inches. In Stock.

Seller Inventory # __0824799518

Bibliographic Details

• Title: Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology
• Publisher: Marcel Dekker Inc
• Publication Date: 1998
• Language: English
• ISBN 10: 0824799518
• ISBN 13: 9780824799519
• Binding: Hardcover
• Condition: Brand New

About this title

Synopsis

"Explores the science and technology of lithographic processes and resist materials and summarizes the most recent innovations in semiconductor manufacturing. Considers future trends in lithography and resist material technology. Reviews the interaction of light, electron beams, and X-rays with resist materials."

About the Author

Saburo Nonogaki, Ueno Takumi, Toshio Ito