Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics: Volume 612

Edited by G. S. Oehrlein , K. Maex , Y. -C. Joo , S. Ogawa , J. T. Wetzel

ISBN 10: 110741315X ISBN 13: 9781107413153
Published by Cambridge University Press, 2014
Language: English
Condition: New Soft cover

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