Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)

Richard C. Jaeger

ISBN 10: 0201146959 / ISBN 13: 9780201146950

Published by Addison-Wesley, 1988

About this Item

Readable copy. Pages may have considerable notes/highlighting. ~ ThriftBooks: Read More, Spend Less 0.84.

Seller Inventory # G0201146959I5N00

Bibliographic Details

• Title: Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
• Publisher: Addison-Wesley
• Publication Date: 1988
• Language: English
• ISBN 10: 0201146959
• ISBN 13: 9780201146950
• Binding: Paperback
• Condition: Fair
• Dust Jacket Condition: No Jacket
• Weight: 0.84 pounds

About this title

Synopsis

Modular Series on Solid State Devices. This volume is a concise survey of the most up-to-date techniques in the field. It is devoted excusively to processing and its highlighted by careful explanations.

From the Back Cover

Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.

The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.