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Introduction to Microelectronic Fabrication: Volume V: 5 (Modular Series on Solid State Devices, Vol 5) - Softcover
Introduction To Microelectronic Fabrication
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Synopsis:
Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.
The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.
This volume is a survey of techniques in the field. It is devoted to processing and is highlighted by explanations.
"About this title" may belong to another edition of this title.
- PublisherPearson
- Publication date1988
- ISBN 10 0201146959
- ISBN 13 9780201146950
- BindingPaperback
- Edition number1
- Number of pages224
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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(1988)
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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(1988)
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