Introduction to Microelectronic Fabrication: Volume V: 5 (Modular Series on Solid State Devices, Vol 5) - Softcover
Synopsis
Modular Series on Solid State Devices. This volume is a concise survey of the most up-to-date techniques in the field. It is devoted excusively to processing and its highlighted by careful explanations.
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From the Back Cover
Introduction to Microelectronic Fabrication, Second Edition, by Richard C. Jaeger, is a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing and is highlighted by careful explanations, clean, simple language, and numerous fully solved example problems.
The second edition includes an entirely new chapter on MEMS, as well as substantial modifications to the chapters on MOS and bipolar process integration. Also included is new or expanded coverage of lithography and exposure systems, trench isolation, chemical mechanical polishing, shallow junctions, transient enhanced diffusion, copper Damascene processes and process simulation.
Synopsis
This volume is a survey of techniques in the field. It is devoted to processing and is highlighted by explanations.
"About this title" may belong to another edition of this title.
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Microelectronic Fabrication
Published by
Pearson Education, Limited, 1988
ISBN 10: 0201146959
ISBN 13: 9780201146950
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Introduction to Microelectronic Fabrication
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Modular Series on Solid State Devices: Introduction to Microelectronic Fabrication (Volume 5)
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Introduction to Microelectronic Fabrication (Volume V)
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Addison-Wesley, Lebanon, Indiana, U.S.A., 1987
ISBN 10: 0201146959
ISBN 13: 9780201146950
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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Introduction to Microelectronic Fabrication (Modular Series on Solid State Devices, Vol 5)
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