Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology)

Rossnagel, Stephen M.; Westwood, William D.; Cuomo, Jerome J.

ISBN 10: 0815512201 ISBN 13: 9780815512202
Published by William Andrew (edition 1), 1991
Language: English
Condition: Used - Very good Hardcover

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