Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions (Materials Science and Process Technology ... Etching, Deposition and Surface Interactions - Hardcover

Stephen M. Rossnagel

 
9780815512202: Handbook of Plasma Processing Technology: Fundamentals, Etching, Deposition and Surface Interactions (Materials Science and Process Technology ... Etching, Deposition and Surface Interactions

Synopsis

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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9781493303359: Handbook of Plasma Processing Technology,

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ISBN 10:  149330335X ISBN 13:  9781493303359
Softcover