Glow Discharge Processes: Sputtering and Plasma Etching

Chapman, Brian

ISBN 10: 047107828X / ISBN 13: 9780471078289

Published by Wiley-Interscience, 1980

About this Item

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Bibliographic Details

Title: Glow Discharge Processes: Sputtering and ...

Publisher: Wiley-Interscience

Publication Date: 1980

Binding: Hardcover

Condition: Acceptable

About this title

Synopsis:

Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

About the Author:

Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.