Synopsis
Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.
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About the Author
Brian Chapman is the author of Glow Discharge Processes: Sputtering and Plasma Etching, published by Wiley.
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Glow Discharge Processes: Sputtering and Plasma Etching
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Glow Discharge Processes: Sputtering and Plasma Etching
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Glow Discharge Processes: Sputtering and Plasma Etching
Published by
John Wiley & Sons, New York, 1980
ISBN 10: 047107828X
ISBN 13: 9780471078289
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Glow Discharge Processes: Sputtering and Plasma Etching
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Glow Discharge Processes: Sputtering and Plasma Etching
Published by
Wiley-Interscience, 1980
ISBN 10: 047107828X
ISBN 13: 9780471078289
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