Glow Discharge Processes

Language: English

Published by John Wiley and Sons Inc, US, 1980

047107828X / 9780471078289

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Develops detailed understanding of the deposition and etching of materials by sputtering discharge, and of etching of materials by chemically active discharge. Treats glow discharge at several levels from basic phenomena to industrial applications--practical techniques diligently related to fundamentals. Subjects range from voltage, distributions encountered in plasma etching systems to plasma-electron interactions that contribute to sustaining the discharge.

Seller Inventory # LU-9780471078289

Title
Glow Discharge Processes
Author
Brian Chapman
Publisher
John Wiley and Sons Inc, US
Publication year
1980
Condition
New
Binding
Hardback
Language
English
ISBN 10
047107828X
ISBN 13
9780471078289
Item weight
848 grams

Rarewaves.com USA

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