CMOS Gate-Stack Scaling Materials, Interfaces and Reliability Implications : Volume 1155
Language: English
Published by Cambridge University Press, 2014
- Softcover
- New
Seller: AHA-BUCH GmbH, Einbeck, GermanyAHA-BUCH GmbH
AbeBooks seller since August 14, 2006
Condition: New
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Add to basketItem description from seller
Druck auf Anfrage Neuware - Printed after ordering - To address the increasing demands of device scaling, new materials are being introduced into conventional Si CMOS processing at an unprecedented rate. Presentations collected here focus on understanding, from a chemistry and materials perspective, the mechanism of interface formation and defects at interfaces, for both conventional Si and alternative channel (Ge or III-V) systems. Several papers address reliability concerns for high-k/metal gate (basic physical models, charge trapping, etc.), while others cover characterization of the thin films and interfaces which comprise the gate stack. Topics include: advanced Si-based gate stacks; and alternate channel materials.
Seller Inventory # 9781107408326
- Title
- CMOS Gate-Stack Scaling Materials, Interfaces and Reliability Implications : Volume 1155
- Author
- Alexander A. Demkov
- Publisher
- Cambridge University Press
- Publication year
- 2014
- Condition
- Neu
- Binding
- Taschenbuch
- Language
- English
- ISBN 10
- 1107408326
- ISBN 13
- 9781107408326
- Item weight
- 290 grams
- Dimensions
- 229x152x11 mm
"Synopsis" may belong to another edition of this title.
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