Ultra Clean Processing of Semiconductor Surfaces IX: Volumes 145-146 (Solid State Phenomena, Volumes 145-146) - Softcover

 
9783908451648: Ultra Clean Processing of Semiconductor Surfaces IX: Volumes 145-146 (Solid State Phenomena, Volumes 145-146)
Softcover
ISBN 10: 3908451647 ISBN 13: 9783908451648
Publisher: Trans Tech Publications Ltd, 2009

Synopsis

Volume is indexed by Thomson Reuters CPCI-S (WoS).
The contents of this publication include every conceivable issue related to contamination, cleaning and surface preparation during mainstream large-scale integrated circuit manufacture. Typically, silicon is used as the main semiconductor substrate. However, other semiconducting materials such as SiGe and SiC are currently being used in the source-sink junction areas, and materials such as Ge and III-V compounds are being considered for the transistor channel region of future-generation devices.

"synopsis" may belong to another edition of this title.

Publisher
Trans Tech Publications Ltd
Publication date
2009
Language
English
ISBN 10 
3908451647
ISBN 13 
9783908451648
Binding
Paperback
Number of pages
412
Editor
Mertens Paul, Meuris Marc, Heyns Marc