Ultra Clean Processing of Semiconductor Surfaces VIII: Volume 134 (Solid State Phenomena, Volume 134) - Softcover
Synopsis
Volume is indexed by Thomson Reuters CPCI-S (WoS).
This collection of 86 peer-reviewed papers covers all aspects of the use of ultra-clean technology for large-scale integration on semiconductors, and cleaning and contamination-control in both front-end-of-line (FEOL) and back-end-of-line (BEOL) processing.
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Ultra Clean Processing of Semiconductor Surfaces VIII. (=Solid State Phenomena ; 134).
Published by
Uetikon am See : Scitec, 2008
ISBN 10: 3908451469
ISBN 13: 9783908451464
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Ultra Clean Processing Of Semiconductor Surfaces (Solid State Phenomena)
Published by
Trans Tech Publications, Ltd., 2008
ISBN 10: 3908451469
ISBN 13: 9783908451464
Used
Paperback
Seller: Mispah books, Redhill, SURRE, United Kingdom
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