Ultra Clean Processing of Silicon Surfaces V: Volumes 76-77 (Solid State Phenomena) - Softcover

Softcover

ISBN 10: 3908450578 ISBN 13: 9783908450573

Publisher: Trans Tech Publications Ltd, 2001

Synopsis

Volume is indexed by Thomson Reuters CPCI-S (WoS).
The proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry and topography, and its relationship to device performance and process yield. New areas of concern include: cleaning at the interconnect level, resist strip and polymer removal (dry and wet), cleaning and contamination aspects of metallization, wafer backside cleaning and cleaning after Chemical-Mechanical-Polishing (CMP).

Edition details

• Publisher: Trans Tech Publications Ltd
• Publication date: 2001
• Language: English
• ISBN 10: 3908450578
• ISBN 13: 9783908450573
• Binding: Paperback
• Number of pages: 340
• Editor: Heyns Marc, Meuris Marc, Mertens Paul