Ultra Clean Processing of Silicon Surfaces IV: Volumes 65-66 (Solid State Phenomena) - Softcover

 
9783908450405: Ultra Clean Processing of Silicon Surfaces IV: Volumes 65-66 (Solid State Phenomena)
Softcover
ISBN 10: 3908450403 ISBN 13: 9783908450405
Publisher: Trans Tech Publications Ltd, 1998

Synopsis

The proceedings of the Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98) cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry and topography, and its relationship to device performance and process yield. New areas of concern include: cleaning at the interconnect level, resist strip and polymer removal (dry and wet), cleaning and contamination aspects of metallization, wafer backside cleaning and cleaning after Chemical-Mechanical-Polishing (CMP).

"synopsis" may belong to another edition of this title.

Publisher
Trans Tech Publications Ltd
Publication date
1998
Language
English
ISBN 10 
3908450403
ISBN 13 
9783908450405
Binding
Paperback
Number of pages
316
Editor
Heyns Marc, Meuris Marc, Mertens Paul

Other Popular Editions of the Same Title

9783908450573: Ultra Clean Processing of Silicon Surfaces V: Volumes 76-77 (Solid State Phenomena)

Featured Edition

ISBN 10:  3908450578 ISBN 13:  9783908450573
Publisher: Trans Tech Publications Ltd, 2001
Softcover