Characterization and Metrology for ULSI Technology 2000: International Conference: v. 550 (AIP Conference Proceedings) - Hardcover

Hardcover

ISBN 10: 156396967X ISBN 13: 9781563969676

Publisher: American Institute of Physics, 2001

Synopsis

The worldwide semiconductor community faces increasingly difficult challenges as it moves into the manufacturing of chips with feature sizes approaching 100 nm. Some of the challenges are materials-related, such as transistors with high-k dielectrics and on-chip interconnects made from copper and low-k dielectrics. The magnitude of these challenges demands special attention from those in the metrology and analytical measurements community. Characterization and metrology are key enablers for developing semiconductor process technology and in improving manufacturing.This book summarizes major issues and gives critical reviews of important measurement techniques that are crucial to continue the advances in semiconductor technology. It covers major aspects of the process technology and most characterization techniques for silicon research, including development, manufacturing, and diagnostics.It provides a concise and effective portrayal of industry characterization needs and some of the problems that must be addressed by industry, academia, and government to continue the dramatic progress in semiconductor technology. It also provides a basis for stimulating practical perspectives and new ideas for research and development.

Edition details

• Publisher: American Institute of Physics
• Publication date: 2001
• Language: English
• ISBN 10: 156396967X
• ISBN 13: 9781563969676
• Binding: Hardcover
• Number of pages: 723
• Editor: Seiler David G., Diebold Alain C., Shaffner Thomas J., McDonald Robert, Bullis W. Murray, Smith Patrick J., Secula Erik M.