Materials Science of Microelectromechanical Systems (Mems) Devices: Symposium Held December 1-2, 1998, Boston, Massachusetts, U.S.A/: 546 (Materials Research Society Symposium Proceedings) - Hardcover

 
9781558994522: Materials Science of Microelectromechanical Systems (Mems) Devices: Symposium Held December 1-2, 1998, Boston, Massachusetts, U.S.A/: 546 (Materials Research Society Symposium Proceedings)
Hardcover
ISBN 10: 1558994521 ISBN 13: 9781558994522
Publisher: Materials Research Society, 2000
Publisher
Materials Research Society
Publication date
2000
Language
English
ISBN 10 
1558994521
ISBN 13 
9781558994522
Binding
Hardcover
Number of pages
246
Editor
Heuer A. H., Jacobs S. Joshua