Items related to Rapid Thermal and Integrated Processing IV: Volume...
Rapid Thermal and Integrated Processing IV: Volume 387: Symposium Held April 17-20, 1995, San Francisco, California, U.S.A (MRS Proceedings) - Hardcover
Synopsis
The title symposium was held at the 1995 MRS Spring Meeting in San Francisco. The proceedings contain 56 invited and contributed papers with a focus on the manufacturing aspects of rapid thermal processing (RTP) and the successful integration of RTP into production semiconductor fabs. Emphasis is placed on process and equipment modeling and the critical aspects of RTP, such as temperature measurement, uniformity, and control. Topics include modeling, sensors, and control; integrated processing and manufacturing; dielectrics; epitaxy, polysilicon, and devices; and junctions, metallization, and contacts. Annotation copyright Book News, Inc. Portland, Or.
"synopsis" may belong to another edition of this title.
Search results for Rapid Thermal and Integrated Processing IV: Volume...
Stock Image
Rapid Thermal and Integrated Processing IV: Volume 387 (MRS Proceedings)
Published by
Materials Research Society, 1995
ISBN 10: 1558992901
ISBN 13: 9781558992900
Used
Hardcover
Seller: Half Price Books Inc., Dallas, TX, U.S.A.
Seller rating 5 out of 5 stars
hardcover. Condition: Very Good. Connecting readers with great books since 1972! Used books may not include companion materials, and may have some shelf wear or limited writing. We ship orders daily and Customer Service is our top priority! Seller Inventory # S_475870168