Items related to Plasma Processes for Semiconductor Fabrication: 8 (Cambridge...

Plasma Processes for Semiconductor Fabrication: 8 (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering, Series Number 8) - Hardcover

Hitchon, W. N. G.

 
9780521591751: Plasma Processes for Semiconductor Fabrication: 8 (Cambridge Studies in Semiconductor Physics and Microelectronic Engineering, Series Number 8)

Synopsis

An up-to-date description of plasma etching and deposition in semiconductor fabrication.

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Book Description

Self-contained book providing an up-to-date description of plasma etching and deposition in semiconductor fabrication. Presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. Suitable as a graduate-level textbook, and will also be a useful reference for practising engineers in the semiconductor industry.

"About this title" may belong to another edition of this title.