Semiconductor Material and Device Characterization - Hardcover

Schroder, Dieter K.

Hardcover

ISBN 10: 0471511048 ISBN 13: 9780471511045

Publisher: Wiley–Blackwell, 1990

Synopsis

This detailed sourcebook provides an up-to-date description and unified treatment of the characterization techniques used in the semiconductor industry. It covers electrical, optical, electron- beam, ion-beam, X-ray and gamma ray methods. This information, until now scattered in journals and review papers, is presented in a unified manner with over 1300 references. It is also a valuable reference book on characterization methods.

About this title

Review

“The book is well–illustrated and provides an ample bibliography.”  (Optics & Photonics News, 4 November 2015)

"I strongly recommend this book for those who want to learn device characterization." ( IEEE Circuits & Devices Magazine, November/December 2006)

From the Back Cover

Semiconductor Material and Device Characterization is the only book on the market devoted to the characterization techniques used by the modern semiconductor industry to measure diverse semiconductor materials and devices. It covers the full range of electrical and optical characterization methods while thoroughly treating the more specialized chemical and physical techniques.

This newly revamped and expanded Second Edition incorporates the many innovations that have come to dominate the field during the past decade. From scanning probe techniques to the detection of metallic impurities in silicon wafers to the use of microwave reflection to measure contactless resistivity, each chapter presents state–of–the–art tools and techniques, most of which were in their infancy or had not yet been developed when the previous edition first came out. Featured here are:
∗ An entirely new chapter on reliability and probe microscopy
∗ Numerous examples and end–of–chapter problems – new to this edition
∗ Five hundred illustrations revised for this edition
∗ Updated bibliography with over 1,200 references
∗ Easy–to–use text including a real–world mix of units rather than strictly MKS units.

This practical new edition is ideal for textbook adoptions at the graduate level and is destined to become an essential reference for research and development teams in the semiconductor industry.

Edition details

• Publisher: Wiley–Blackwell
• Publication date: 1990
• Language: English
• ISBN 10: 0471511048
• ISBN 13: 9780471511045
• Binding: Hardcover
• Number of pages: 624