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Synopsis
This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V compound semiconductors, dry etching of refractory metal silicides and dry etching aluminium and aluminium alloys. This topical format provides the reader with more specialised information and references than found in a general review article. In addition, it presents a broad perspective which would otherwise have to be gained by reading a large number of individual research papers. An additional important and unique feature of this book is the inclusion of an extensive literature review of dry processing, compiled by search of computerized data bases. A subject index allows ready access to the key points raised in each of the chapters.
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Dry etching for microelectronics (Materials processing--theory and practices)
Published by
Distributors for the USA and Canada, Elsevier Science Pub. Co, 1984
ISBN 10: 0444869050
ISBN 13: 9780444869050
Used
Hardcover
Seller: ThriftBooks-Atlanta, AUSTELL, GA, U.S.A.
Seller rating 5 out of 5 stars
Hardcover. Condition: Very Good. No Jacket. Former library book; May have limited writing in cover pages. Pages are unmarked. ~ ThriftBooks: Read More, Spend Less. Seller Inventory # G0444869050I4N10
Stock Image
Dry etching for microelectronics (Materials processing--theory and practices)
Published by
Distributors for the USA and Canada, Elsevier Science Pub. Co, 1984
ISBN 10: 0444869050
ISBN 13: 9780444869050
Used
Hardcover
Seller: thebookforest.com, San Rafael, CA, U.S.A.
Seller rating 4 out of 5 stars
Condition: Like New. hardcover. Text block firm and clean, binding unblemished, boards straight, without highlights or underlining. Fine, like new condition. Supporting Bay Area Friends of the Library since 2010. Well packaged and promptly shipped. Seller Inventory # BAY19-00174