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Micro Mechanical Systems: Principles and Technology (Volume 6) (Handbook of Sensors and Actuators, Volume 6) - Hardcover
Synopsis
In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
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Handbook of Sensors and Actuators: Micro Mechanical Systems: Principles and Technology (Volume 6)
Seller: Anybook.com, Lincoln, United Kingdom
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Condition: Good. Volume 6. This is an ex-library book and may have the usual library/used-book markings inside.This book has hardback covers. In good all round condition. No dust jacket. Please note the Image in this listing is a stock photo and may not match the covers of the actual item,700grams, ISBN:0444823638. Seller Inventory # 5762902
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Micro Mechanical Systems: Principles and Technology (Volume 6) (Handbook of Sensors and Actuators, Volume 6, Band 6)
Seller: Roland Antiquariat UG haftungsbeschränkt, Weinheim, Germany
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Hardcover: 17.8 x 1.9 x 23 cm. Illustrated. 276 p. Neu und originalverschweißt! --- Brand new and welded! 9780444823632 Sprache: Englisch Gewicht in Gramm: 662. Seller Inventory # 214963
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Micro Mechanical Systems : Principles and Technology Volume 6
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ELSEVIER SCIENCE & TECHNOLOGY, 1998
ISBN 10: 0444823638
ISBN 13: 9780444823632
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Seller: Buchpark, Trebbin, Germany
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Condition: Gut. Zustand: Gut | Seiten: 276 | Sprache: Englisch | Produktart: Bücher | Keine Beschreibung verfügbar. Seller Inventory # 11914303/3
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Micro Mechanical Systems : Principles and Technology Volume 6
Published by
ELSEVIER SCIENCE & TECHNOLOGY, 1998
ISBN 10: 0444823638
ISBN 13: 9780444823632
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Hardcover
Seller: Buchpark, Trebbin, Germany
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Condition: Sehr gut. Zustand: Sehr gut | Seiten: 276 | Sprache: Englisch | Produktart: Bücher | Keine Beschreibung verfügbar. Seller Inventory # 11914303/202
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Micro Mechanical Systems: Principles and Technology (Handbook of Sensors and Actuators)
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Elsevier Science 1998-07-24, 1998
ISBN 10: 0444823638
ISBN 13: 9780444823632
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Hardcover. Condition: New. Seller Inventory # 6666-ELS-9780444823632
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MICRO-MECHANIC SYST HOSA6H
Print on DemandSeller: Brook Bookstore On Demand, Napoli, NA, Italy
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Condition: new. Questo è un articolo print on demand. Seller Inventory # e8d4049a248c42d0c2ea80b853127037
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Micro Mechanical Systems: Principles and Technology
Seller: Revaluation Books, Exeter, United Kingdom
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Hardcover. Condition: Brand New. 1st edition. 276 pages. 10.00x7.00x0.75 inches. In Stock. Seller Inventory # __0444823638
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Micro Mechanical Systems
Print on DemandSeller: BuchWeltWeit Ludwig Meier e.K., Bergisch Gladbach, Germany
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Buch. Condition: Neu. This item is printed on demand - it takes 3-4 days longer - Neuware -In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems. Englisch. Seller Inventory # 9780444823632
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Micro Mechanical Systems : Principles and Technology
Print on DemandSeller: AHA-BUCH GmbH, Einbeck, Germany
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Buch. Condition: Neu. nach der Bestellung gedruckt Neuware - Printed after ordering - In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems. Seller Inventory # 9780444823632
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Micro Mechanical Systems: Principles and Technology (Volume 6) (Handbook of Sensors and Actuators, Volume 6, Band 6) Fukuda, T. und Wolfgang Menz
Seller: BUCHSERVICE / ANTIQUARIAT Lars Lutzer, Wahlstedt, Germany
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Condition: gut. 1998. Micro Mechanical Systems: Principles and Technology (Volume 6) (Handbook of Sensors and Actuators, Volume 6, Band 6) In englischer Sprache. pages. Seller Inventory # BN497609