Rapid Thermal Processing for Future Semiconductor Devices - Softcover

 
9780444513397: Rapid Thermal Processing for Future Semiconductor Devices
Softcover
ISBN 10: 0444513396 ISBN 13: 9780444513397
Publisher: Elsevier Science, 2003

Synopsis

This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is second conference followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered the latest developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices. This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.

"synopsis" may belong to another edition of this title.

Synopsis

This volume is a collection of papers which were presented at the 2001 International Conference on Rapid Thermal Processing (RTP 2001) held at Ise Shima, Mie, on November 14-16, 2001. This symposium is a second conference that followed the previous successful first International RTP conference held at Hokkaido in 1997. The RTP 2001 covered developments in RTP and other short-time processing continuously aiming to point out the future direction in the Silicon ULSI devices and II-VI, III-V compound semiconductor devices. This book covers the following areas: advanced MOS gate stack, integration technologies, advancd channel engineering including shallow junction, SiGe, hetero-structure, novel metallization, inter-connect, silicidation, low-k materials, thin dielectrics including gate dielectrics and high-k materials, thin film deposition including SiGe, SOI and SiC, process and device modelling, Laser-assisted crystallization and TFT device fabrication technologies, temperature monitoring and slip-free technologies.

"About this title" may belong to another edition of this title.

Publisher
Elsevier Science
Publication date
2003
Language
English
ISBN 10 
0444513396
ISBN 13 
9780444513397
Binding
Paperback
Number of pages
160
Editor
Fukuda Hisashi