SEMICONDUCTOR PROCESSING : ASTM Symposium (STP 850)

Language: English

Published by ASTM, Philadelphia, PA, 1984

0803104030 / 9780803104037

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Text/BRAND NEW & Bright First Edition, First Thus. Illustrated blue boards/NF; rub to lower back corner tip & light shelfwear. DJ/None as Issued. Papers presented at the 3rd ASTM Symposium on Semiconductor Processing, San Jose, Feb 7 - 10, 1984. Special Technical Publication 850. 671 pgs in 7 sections: 1, Standards in Semiconductor Industry; 2, Fabrication Technology; 3, Control of Particulate Contamination; 4, Defects & Gettering Techniques; 5, Material & Process Characterization; 6, Interconnection Technology: Wire & Tape Bonding; 7, Neutron Transmutation Doping Techniques & Facilities, followed by 3 appendices. Fine copy.

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Bibliographic details

Title
SEMICONDUCTOR PROCESSING : ASTM Symposium (STP 850)
Author
Dinesh C. Gupta (Editor)
Publisher
ASTM, Philadelphia, PA
Publication year
1984
Condition
New
Dust jacket
None as Issued
Binding
Hardcover
Language
English
ISBN 10
0803104030
ISBN 13
9780803104037
Edition
First Edition. First Thus
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