Run-to-Run Control in Semiconductor Manufacturing (Hardcover)
Language: English
Published by Taylor & Francis Inc, Bosa Roca, 2000
- First Edition
- Hardcover
- New
Seller: AussieBookSeller, Truganina, VIC, AustraliaAussieBookSeller
AbeBooks seller since June 22, 2007
Condition: New
£ 392.45
Quantity: 1 available
Add to basketItem description from seller
Hardcover. Run-to-Run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run-to-Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control. Offers analyses of run-to-run (R2R) control. Through manufacturing case studies, this book provides justification for and demonstrates the benefits of run-to-run control, and offers the know-how and direction for incorporating R2R control into readers' manufacturing capabilities. Shipping may be from our Sydney, NSW warehouse or from our UK or US warehouse, depending on stock availability. …
Seller Inventory # 9780849311789
- Title
- Run-to-Run Control in Semiconductor Manufacturing (Hardcover)
- Author
- James Moyne
- Publisher
- Taylor & Francis Inc, Bosa Roca
- Publication year
- 2000
- Condition
- new
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0849311780
- ISBN 13
- 9780849311789
- Edition
- 1st Edition
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About the Author
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AussieBookSeller
Truganina, VIC, Australia
AbeBooks seller since June 22, 2007
Shipping rates from Australia to U.S.A.
| Item | 25 to 45 business days | 8 to 14 business days |
|---|---|---|
| First item | £ 27.88 | £ 33.15 |
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The Nile Group Pty Ltd
42 Apex Drive
Truganina, VIC Australia 3029
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