Report of the Second Workshop on Synchrotron Radiation Sources For X-Ray Lithography; Held at Brookhaven National Laboratory August 25-27, 1986 BNL 38789
Published by Brookhaven National Laboratory Associated Universities, Inc, Upton, NY, 1986
- First Edition
- Used
Seller: Ground Zero Books, Ltd., Silver Spring, MD, U.S.A.Ground Zero Books, Ltd.
AbeBooks seller since August 14, 1998
Condition: Used - Very good
£ 65.42
Quantity: 1 available
Add to basketItem description from seller
[2], ii-iii, 10, xxxcii, [1] pages. Informal Report. Oversized book, measuring 11 inches by 8-1/2 Includes Executive Summary and Recommendations; Background; Need for Synchrotron Radiation; International Competition; Technical Feasibility of X-ray Lithography; Synchrotron Performance Specifications; Synchrotron Construction Options; Recommendations; and Near-term Plan. Also includes four Appendices: Agenda; List of Attendees; Conventional Magnet Storage Rings for X-ray Lithography; and Overview of a Complete Lithography Program. The initiative and momentum behind the effort to coordinate a US based program for the source for X-ray lithography continued at this second workshop. Designs for three storage rings meeting the specifications established at the March workshop were presented and evaluated. In order not to miss the "window of opportunity" for implementing a US based X-ray lithography program, a pilot manufacturing plant including an X-ray lithography program, a pilot manufacturing plant including an X-ray source and full wafer processing facilities must begin construction immediately to be ready for operation in 1990. The initiative and momentum behind the effort to coordinate a US based program for the source for X-ray lithography continued at this second workshop. Designs for three storage rings (one superconducting and two conventional) meeting the specifications established at the March workshop were presented and evaluated. Several R&D and other items relating to synchrotron radiation sources and their application to lithography were discussed. More importantly, however, the workshop identified the next phases necessary if this effort is to succeed. In order not to miss the "window of opportunity" for implementing a US based Xray lithography program, a pilot manufacturing plant including an X-ray source and full wafer processing facilities must begin construction immediately to be ready for operation in 1990. This pilot plant would have the X-ray source based on conventional technology as discussed in the workshop, and a high energy injector. On this prototype, studies of lower energy injection would be made so that cost-effective copies of the source could then be manufactured for distribution to semiconductor manufacturing companies. In addition, a program to construct and evaluate the superconducting machine discussed at the workshop should proceed in parallel with the other efforts. It is possible that such machines may ultimately prove to be the X-ray sources of choice. A small planning workshop to identify the cost and manpower required to implement the described program within the required time-scale should be held as soon as possible. It should be noted that, in the interim between now and the implementation of this program, some lithography effort can proceed at NSLS at Brookhaven, SSRL at Stanford, and SRC at the University of Wisconsin.…
Seller Inventory # 79943
Bibliographic details
- Title
- Report of the Second Workshop on Synchrotron Radiation Sources For X-Ray Lithography; Held at Brookhaven National Laboratory August 25-27, 1986 BNL 38789
- Author
- Barton, M. Q. (Editor), and Craft, G. (Editor), and Williams, G. P. (Editor)
- Publisher
- Brookhaven National Laboratory Associated Universities, Inc, Upton, NY
- Publication year
- 1986
- Condition
- Very good
- Binding
- Tape binding
- Edition
- Presumed First Edition, First printing.
Ground Zero Books, Ltd.
Silver Spring, MD, U.S.A.
AbeBooks seller since August 14, 1998
Shipping rates within U.S.A.
| Item | 5 to 20 business days | 3 to 6 business days |
|---|---|---|
| First item | £ 3.74 | £ 5.60 |
Payment methods
- Check
- Invoice
- Money Order
- Paypal
Store description
Founded and operated by trained historians, Ground Zero Books, Ltd., serves the book collector, the scholar, and institutions. We focus on the individual, and pride ourselves on our personal service. Please contact us with your wants, as we have many books not yet listed in our database.
Specialty
Military History, Nuclear, American Revolution, Military Medicine, Vietnam, World War II, British Empire, World War I, Unit Histories, Civil WarSeller's business information
Ground Zero Books, Ltd.
9033 Georgia Avenue
Silver Spring, MD U.S.A. 20910-2254
Terms of sale
Books are subject to prior sale. Please ask us to hold a book for you before you
mail your check. Books are returnable within 7 days, if not satisfactory. MD
residents add 6% state sales tax.
The mailing address for Ground Zero Books, Ltd. (a subchapter-S corporation) is
P.O. Box 8369, Silver Spring, MD 20907-8369. You can reach us by phone at 301-
585-1471, by fax at 301-920-0253, or by e-mail at gzbooksltd@aol.com. Ground Zero
Books, Ltd., is owned & operated by R. Alan Lewis & Lynne Haims.
Right of withdrawal
If you are a consumer you can withdraw from the contract in accordance with the following. Consumer means any natural person who is acting for purposes which are outside his trade, business, craft or profession.
Information regarding the right of withdrawal
Statutory right to withdraw
You have the right to withdraw from this contract within 14 days without giving any reason.
The withdrawal period will expire after 14 days from the day on which you acquire, or a third party other than the carrier and indicated by you acquires, physical possession of the last good or the last lot or piece.
To exercise the right of withdrawal, electronically fill in and submit a clear statement on our website, under "My Purchases" in "My Account". We will communicate to you an acknowledgement of receipt of such a withdrawal on a durable medium (e.g. by e-mail) without delay.
To meet the withdrawal deadline, it is sufficient for you to send your communication concerning your exercise of the right of withdrawal before the withdrawal period has expired.
Effects of withdrawal
If you withdraw from this contract, we will reimburse to you all payments received from you, including the costs of delivery (except for the supplementary costs arising if you chose a type of delivery other than the least expensive type of standard delivery offered by us).
We may make a deduction from the reimbursement for loss in value of any goods supplied, if the loss is the result of unnecessary handling by you.
We will make the reimbursement without undue delay, and not later than 14 days after the day on which we are informed about your decision to withdraw from this contract.
We will make the reimbursement using the same means of payment as you used for the initial transaction, unless you have expressly agreed otherwise; in any event, you will not incur any fees as a result of such reimbursement.
We may withhold reimbursement until we have received the goods back, or you have supplied evidence of having sent back the goods, whichever is the earliest.
You shall send back the goods or hand them over to Ground Zero Books, Ltd., Silver Spring, Maryland, U.S.A., +1 240-316-0119, without undue delay and in any event not later than 14 days from the day on which you communicate your withdrawal from this contract to us. The deadline is met if you send back the goods before the period of 14 days has expired. You will have to bear the direct cost of returning the goods. You are only liable for any diminished value of the goods resulting from the handling other than what is necessary to establish the nature, characteristics and functioning of the goods.
Exceptions to the right of withdrawal
The right of withdrawal does not apply to:
- The delivery of newspapers, journals or magazines with the exception of subscription contracts; and
- The supply of digital content which is not supplied on a tangible medium (e.g. on a CD or DVD) if you accepted when you placed your order that we could start to deliver it, and that you could not withdraw once delivery had started.
Shipping terms
Orders usually ship within 2 business days. Shipping costs are based on books
weighing 2.2 LB, or 1 KG. If your book order is heavy or oversized, we may contact
you to let you know extra shipping is required.