Nanolithography and Patterning Techniques in Microelectronics. (=Woodhead Publ. in Materials).
Language: English
Published by Abington, Woodhead Publ. Ltd., 2005
Series: Book 8 of 203 - Woodhead Publishing Series in Electronic and Optical Materials
- First Edition
- Hardcover
- Used

Seller: Antiquariat Thomas Haker GmbH & Co. KG, Berlin, GermanyAntiquariat Thomas Haker GmbH & Co. KG
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Condition: Used - Fine
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Add to basketItem description from seller
409 S. Very Good. Shrink wrapped. Sprache: Englisch Gewicht in Gramm: 910.
Seller Inventory # 815011
- Title
- Nanolithography and Patterning Techniques in Microelectronics. (=Woodhead Publ. in Materials).
- Author
- Bucknall, David G.:
- Publisher
- Abington, Woodhead Publ. Ltd.
- Publication year
- 2005
- Condition
- Sehr gut
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0849334470
- ISBN 13
- 9780849334474
- Edition
- 1st ed.
- Item weight
- 910 grams
- Series
- Book 8 of 203: Woodhead Publishing Series in Electronic and Optical Materials
- Seller catalogs
- Elektrotechnik, Elektronik, Mechanik
"Synopsis" may belong to another edition of this title.
From the Back Cover
emergence of advanced polymers with applications in areas such as
microelectronics. Surface patterning of polymers has conventionally been
undertaken by optical lithography. However, a new generation of
nanolithographic and patterning techniques has made it possible to develop
complex patterns at the nanoscale. Non-conventional lithography and
patterning summarises this new range of techniques and their industrial
applications.
A number of chapters look at ways of forming and modifying surfaces for
patterning. These are complemented by chapters on particular patterning
techniques such as soft lithography, ion beam patterning, the use of
nanostencils, photolithography and inkjet printing. The book also discusses
prototyping and the manufacture of particular devices.
With its distinguished international team of contributors, Non-conventional
lithography and patterning is a standard reference for both those
researching and using advanced polymers in such areas as microelectronics
and biomedical devices.
"About the title" may belong to another edition of this title.
Antiquariat Thomas Haker GmbH & Co. KG
Berlin, Germany
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