Introduction to Microsystem Technology: A Guide for Students
Language: English
Published by Wiley, 2008
- First Edition
- Hardcover
- New
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- Title
- Introduction to Microsystem Technology: A Guide for Students
- Author
- Gerald Gerlach; Wolfram Dotzel
- Publisher
- Wiley
- Publication year
- 2008
- Condition
- New
- Binding
- Hardcover
- Language
- English
- ISBN 10
- 0470058617
- ISBN 13
- 9780470058619
- Edition
- 1st Edition
This textbook focuses on the essentials of microsystems technology, providing a knowledgeable grounding and a clear path through this well-established scientific dicipline. With a methodical, student-orientated approach, Introduction to Microsystem Technology covers the following:
- microsystem materials (including silicon, polymers and thin films), and the scaling effects of going micro;
- fabrication techniques based on different material properties, descriptions of their limitations and functional and shape elements produced by these techniques;
- sensors and actuators based on elements such as mechanical, fluidic, and thermal (yaw rate sensor components are described);
- the influence of technology parameters on microsystem properties, asking, for example, when is the function of a microsystem device robust and safe?
The book presents problems at the end of each chapter so that you may test your understanding of the key concepts (full solutions for these are given on an accompanying website). Practical examples are included also, as well as case studies that enable a better understanding of the technology as a whole. With its extensive treatment on the fundamentals of microsystem technology, this book also serves as a compendium for engineers and technicians working with microsystem technology.
"Synopsis" may belong to another edition of this title.
About the Author
Wolfram Dötzel is currently Professor for Microsystems and Precision Engineering at Chemnitz University of Technology, also holding the position of Vice-President for Research at the university. His main research fields are in the modelling, design and simulation of micromechanical components, characterization and testing of micromechanical components by experimental methods, and adaptation of methods and principles of precision engineering for microsystems. He teaches courses in Microsystems, reliability and the design of devices and has previously co-authored Einführung in die Mikrosystemtechnik (Hanser, 2006) with Gerald Gerlach. He has also authored a chapter in the book Manual of Data Acquisition (Verlag Technik, 1984), more than 130 publications in journals and conference proceedings on micromechanical and precision engineering components as well as modelling, simulation, and characterization, and holds 8 patents.
"About the title" may belong to another edition of this title.
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