Seller: Books Puddle, New York, NY, U.S.A.
Condition: New. 1st Edition.
Seller: Majestic Books, Hounslow, United Kingdom
Condition: New.
Seller: Ria Christie Collections, Uxbridge, United Kingdom
£ 45.68
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Add to basketCondition: New. In.
Seller: Biblios, Frankfurt am main, HESSE, Germany
Condition: New.
Seller: Basi6 International, Irving, TX, U.S.A.
Condition: Brand New. New. US edition. Expediting shipping for all USA and Europe orders excluding PO Box. Excellent Customer Service.
Language: English
Published by Springer Fachmedien Wiesbaden, 2023
ISBN 10: 365841040X ISBN 13: 9783658410407
Seller: AHA-BUCH GmbH, Einbeck, Germany
Taschenbuch. Condition: Neu. Druck auf Anfrage Neuware - Printed after ordering - The book presents the basic steps and the technical implementation of individual processes for microelectronic circuit integration in silicon. Interaction and influences of e. g. oxidation, etching,doping and thermal processes for integrating CMOS- and Bipolar circuits are discussed in detail, beginning with the purification of silicon up to the encapsulated integrated circuit. It includesmodern processes like atomic layer deposition and etching for nanoscale structures and compares improvements like silicide contacts, copper metallization, high-k dielectrics, and SOI and FINFET structures. All processes are presented looking from the process engineer's view.
Seller: preigu, Osnabrück, Germany
Taschenbuch. Condition: Neu. Silicon Semiconductor Technology | Processing and Integration of Microelectronic Devices | Ulrich Hilleringmann | Taschenbuch | xi | Englisch | 2023 | Springer Gabler | EAN 9783658410407 | Verantwortliche Person für die EU: Springer Vieweg in Springer Science + Business Media, Abraham-Lincoln-Str. 46, 65189 Wiesbaden, juergen[dot]hartmann[at]springer[dot]com | Anbieter: preigu.