Micro Nano Fabrication Basic Research (1 results)

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Micro-nano fabrication of basic research academic writings Series: micro-electromechanical systems (MEMS) manufacturing technology(Chinese Edition)
YUAN WEI ZHENG . QIAO DA YONG
Language: Chinese
Published by Science Press
7030399749 / 9787030399748
- Hardcover
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Hardcover. Condition: New. HardCover. Pub Date :2014-03-01 Pages: 240 Language: Chinese Publisher: Science Press micro-nano manufacturing of basic research academic writings Series: micro-electromechanical systems (MEMS) manufacturing technology discusses micro-electromechanical systems (MEMS) manufacturing Technology. 9 book chapters. Chapter 1 describes the definition of MEMS manufacturing technology. the development process and development trends; Chapter 2 describes the fabrication of MEMS-based materials; Chapter . …